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Et nyt liv As part of the process of encouraging and appreciating the quality of written and presented work in the technical program, ITC presents awards to authors of regular technical paper given at the conference and published in the proceedings. Technical Papers on Lithography by
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Films for Self-Aligned Contacts Summary Many steps in IC fabrication can be "self-aligned" to previous steps if a part of the deposited insulating layer is resistant to the process that is used to etch the silicon dioxide or BPSG layers.
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